Simultaneous micromachining with beam splitting of ultrashort laser pulses at high average power for the productive fabrication of microchannels
| Autor: | Cirakoglu, Kathrin, Holder, Daniel, Richmond, Aaron, Flamm, Daniel, Grossmann, Daniel, Sutter, Dirk, Hagenlocher, Christian, Graf, Thomas |
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| Zdroj: | In Procedia CIRP 2024 124:708-711 |
| Databáze: | ScienceDirect |
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