Enhancing the Performance of MEMS Piezoresistive Pressure Sensor Using Germanium Nanowire
| Autor: | Shaby, S. Maflin, Premi, M.S. Godwin, Martin, Betty |
|---|---|
| Zdroj: | In Procedia Materials Science 2015 10:254-262 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Shaby, S. Maflin, Premi, M.S. Godwin, Martin, Betty |
|---|---|
| Zdroj: | In Procedia Materials Science 2015 10:254-262 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|