Metallic indium segregation control of InN thin films grown on Si(1 0 0) by plasma-enhanced atomic layer deposition
| Autor: | An, Yunlai, He, Yingfeng, Wei, Huiyun, Liu, Sanjie, Li, Meiling, Song, Yimeng, Qiu, Peng, Rehman, Abdul, Zheng, Xinhe, Peng, Mingzeng |
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| Zdroj: | In Results in Physics March 2019 12:804-809 |
| Databáze: | ScienceDirect |
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