Study on machining characteristics of magnetically controlled laser induced plasma micro-machining single-crystal silicon
| Autor: | Zhang, Yanming, Zhang, Zhen, Zhang, Yi, Liu, Denghua, Wu, Jie, Huang, Yu, Zhang, Guojun |
|---|---|
| Zdroj: | In Journal of Advanced Research May 2021 30:39-51 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|