AFM and XPS study from surfaces of native oxide/Al-metal

Autor: IRIE, Yoshihiro, MARUO, Yujiro, KATAOKA, Noriyuki, TANAKA, Hiromi, KINOSHITA, Kentaro, KISHIDA, Satoru
Zdroj: In Procedia Engineering 2017 216:182-189
Databáze: ScienceDirect