RF Sputtering of ZnO (002) Thin Films on Top of 3C-SiC-on-Si (100) Substrates for Low Cost Piezoelectric Devices
| Autor: | Sasi, V. Valliyil, Iqbal, A., Chaik, K., Tanner, P., Iacopi, A., Mohd-Yasin, F. |
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| Zdroj: | In Procedia Engineering 2016 168:1086-1089 |
| Databáze: | ScienceDirect |
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