A Compact CMOS Compatible micro-Pirani Vacuum Sensor with Wide Operating Range and Low Power Consumption
| Autor: | Piotto, Massimo, Del Cesta, Simone, Bruschi, Paolo |
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| Zdroj: | In Procedia Engineering 2016 168:766-769 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Piotto, Massimo, Del Cesta, Simone, Bruschi, Paolo |
|---|---|
| Zdroj: | In Procedia Engineering 2016 168:766-769 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|