A New Technology of Ultrathin AlN Piezoelectric Sensor for Pulse Wave Measurement

Autor: Bongrain, A., Rousseau, L., Valbin, L., Madaoui, N., Lissorgues, G., Verjus, F., Chapon, P.A.
Zdroj: In Procedia Engineering 2015 120:459-463
Databáze: ScienceDirect