Low Temperature Sub-micron Gap Thin-film Silicon Resonators on Glass Substrate
| Autor: | Mouro, J., Gualdino, A., Teagno, L., Chu, V., Conde, J.P. |
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| Zdroj: | In Procedia Engineering 2014 87:1418-1421 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Mouro, J., Gualdino, A., Teagno, L., Chu, V., Conde, J.P. |
|---|---|
| Zdroj: | In Procedia Engineering 2014 87:1418-1421 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|