Miniaturized Microcantilever-based RF Microwave Probes Using MEMS Technologies
| Autor: | Marzouk, Jaouad, Arscott, Steve, Haddadi, Kamel, Lasri, Tuami, Boyaval, Christophe, Lepilliet, Sylvie, Dambrine, Gilles |
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| Zdroj: | In Procedia Engineering 2014 87:692-695 |
| Databáze: | ScienceDirect |
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