Frequency Domain Based Measurement Method for the Thermal Parameters of a Thin-film Diaphragm Embedded in a MEMS Multi-parameter Wind Sensor
| Autor: | Beigelbeck, R., Reyes-Romero, D., Cerimovic, S., Kohl, F., Voglhuber-Brunnmaier, T., Jakoby, B., Urban, G.A. |
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| Zdroj: | In Procedia Engineering 2014 87:632-635 |
| Databáze: | ScienceDirect |
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