Piezoelectric Micro-pump with PZT Thin Film for Low Consumption Microfluidic Devices
| Autor: | Cazorla, P.-H., Fuchs, O., Cochet, M., Maubert, S., Le Rhun, G., Robert, P., Fouillet, Y., Defay, E. |
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| Zdroj: | In Procedia Engineering 2014 87:488-491 |
| Databáze: | ScienceDirect |
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