A CMOS-MEMS Thermopile with an Integrated Temperature Sensing Diode for Mid-IR Thermometry
| Autor: | Hopper, R., Ali, S., Chowdhury, M., Boual, S., De Luca, A., Gardner, J.W., Udrea, F. |
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| Zdroj: | In Procedia Engineering 2014 87:1127-1130 |
| Databáze: | ScienceDirect |
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