Integrated Investigation Approach for Determining Mechanical Properties of Poly-silicon Membranes
| Autor: | Brueckner, John, Dehé, Alfons, Auerswald, Ellen, Dudek, Rainer, Michel, Bernd, Rzepka, Sven |
|---|---|
| Zdroj: | In Procedia Engineering 2014 87:879-882 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|