SOI CMOS MEMS Infra-red Thermal Source with Carbon Nanotubes Coating

Autor: De Luca, A., Cole, M.T., Hopper, R.H., Ali, S.Z., Udrea, F., Gardner, J.W., Milne, W.I.
Zdroj: In Procedia Engineering 2014 87:839-842
Databáze: ScienceDirect