MOEMS Vibration Sensor for Advanced Low-frequency Applications with pm Resolution
| Autor: | Hortschitz, W., Kainz, A., Steiner, H., Stifter, M., Kohl, F., Schalko, J., Sauter, T., Keplinger, F. |
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| Zdroj: | In Procedia Engineering 2014 87:835-838 |
| Databáze: | ScienceDirect |
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