Investigation of the Effects of Hydrodynamic and Parasitic Electrostatic Forces on the Dynamics of a High Aspect Ratio MEMS Accelerometer
| Autor: | Cerini, F., Ferrari, M., Ferrari, V., Russo, A., Urquia, M. Azpeitia, Ardito, R., De Masi, B., Almasi, A., Iannuzzi, D., Sedmik, R.I.P. |
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| Zdroj: | In Procedia Engineering 2014 87:827-830 |
| Databáze: | ScienceDirect |
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