Modelling and testing of a MEMS accelerometer controlled and read-out beyond the pull-in instability limit
| Autor: | Langfelder, Giacomo, Frizzi, Tommaso, Tocchio, Alessandro, Lasalandra, Ernesto, Longoni, Antonio |
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| Zdroj: | In Procedia Engineering 2010 5:1067-1070 |
| Databáze: | ScienceDirect |
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