Influence of seed layer on crystallinity and orientation of pulsed — DC sputtered AlN thin-films for piezoelectric actuators
| Autor: | Tran, A.T., Schellevis, H., Pham, H.T.M., Shen, C., Sarro, P.M. |
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| Zdroj: | In Procedia Engineering 2010 5:886-889 |
| Databáze: | ScienceDirect |
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