Sputter Deposition of Cuprous and Cupric Oxide Thin Films Monitored by Optical Emission Spectroscopy for Gas Sensing Applications
| Autor: | Nayan, Nafarizal, Sahdan, Mohd Zainizan, Wei, Low Jia, Ahmad, Mohd Khairul, Lias, Jais, Shakaff, Ali Yeon Md, Zakaria, Ammar, Zain, Ahmad Faizal Mohd |
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| Zdroj: | In Procedia Chemistry 2016 20:124-129 |
| Databáze: | ScienceDirect |
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