Single stage deflection amplification mechanism in a SOG capacitive accelerometer
| Autor: | Zeimpekis, I., Kraft, M. |
|---|---|
| Zdroj: | In Procedia Chemistry September 2009 1(1):883-886 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
| Autor: | Zeimpekis, I., Kraft, M. |
|---|---|
| Zdroj: | In Procedia Chemistry September 2009 1(1):883-886 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|