AlN on nanocrystalline diamond piezoelectric cantilevers for sensors/actuators
| Autor: | Mortet, V., Soltani, A., Talbi, A., Pobedinskas, P., Haenen, K., De Jaeger, J-C., Pernod, P., Wagner, P. |
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| Zdroj: | In Procedia Chemistry September 2009 1(1):40-43 |
| Databáze: | ScienceDirect |
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