Process Development for a High-throughput Fine Line Metallization Approach Based on Dispensing Technology

Autor: Pospischil, M., Klawitter, M., Kuchler, M., Specht, J., Gentischer, H., Efinger, R., Kroner, C., Luegmair, M., König, M., Hörteis, M., Mohr, C., Wende, L., Lossen, J., Weiß, M., Doll, O., Koehler, I., Zengerle, R., Clement, F., Biro, D.
Zdroj: In Energy Procedia 2013 43:111-116
Databáze: ScienceDirect