Ozone-based Batch Atomic Layer Deposited Al2O3 for Effective Surface Passivation
| Autor: | von Gastrow, Guillaume, Li, Shuo, Repo, Päivikki, Bao, Yameng, Putkonen, Matti, Savin, Hele |
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| Zdroj: | In Energy Procedia 2013 38:890-894 |
| Databáze: | ScienceDirect |
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