Silicon Surface Passivation by Al2O3: Effect of ALD Reactants
| Autor: | Repo, Päivikki, Talvitie, Heli, Li, Shuo, Skarp, Jarmo, Savin, Hele |
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| Zdroj: | In Energy Procedia 2011 8:681-687 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Repo, Päivikki, Talvitie, Heli, Li, Shuo, Skarp, Jarmo, Savin, Hele |
|---|---|
| Zdroj: | In Energy Procedia 2011 8:681-687 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|