Passivation of Si Wafers by ALD-Al2O3 Films with Different Surface Conditioning
| Autor: | Lüder, Thomas, Hahn, Giso, Terheiden, Barbara |
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| Zdroj: | In Energy Procedia 2011 8:660-665 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Lüder, Thomas, Hahn, Giso, Terheiden, Barbara |
|---|---|
| Zdroj: | In Energy Procedia 2011 8:660-665 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|