Adsorption characteristics and kinetics of organic airborne contamination for the chemical filters used in the fan-filter unit (FFU) of a cleanroom
Autor: | Hu, Shih-Cheng, Chang, Andy, Shiue, Angus *, Lin, Ti, Liao, Song-Dun |
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Zdroj: | In Journal of the Taiwan Institute of Chemical Engineers June 2017 75:87-96 |
Databáze: | ScienceDirect |
Externí odkaz: |