Adsorption characteristics and kinetics of organic airborne contamination for the chemical filters used in the fan-filter unit (FFU) of a cleanroom

Autor: Hu, Shih-Cheng, Chang, Andy, Shiue, Angus *, Lin, Ti, Liao, Song-Dun
Zdroj: In Journal of the Taiwan Institute of Chemical Engineers June 2017 75:87-96
Databáze: ScienceDirect