Fabrication of High-aspect-ratio Microstructures for LIGA-technology by Sinchrotron Radiation Polymerisation of Thetetraacrylate Monomer
| Autor: | Derevyanko, D.I., Shelkovnikov, V.V., Orlova, N.A., Goldenberg, B.G., Lemzyakov, A.G., Korolkov, V.P. |
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| Zdroj: | In Physics Procedia 2017 86:122-126 |
| Databáze: | ScienceDirect |
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