NIR Microscopy Possibilities for the Visualization of Silicon Microelectronic Structure Topology through the Substrate
| Autor: | Mavritskii, O.B., Egorov, A.N., Nastulyavichus, A.A., Pechenkin, A.A., Smirnov, N.A., Chumakov, A.I. |
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| Zdroj: | In Physics Procedia 2015 73:183-188 |
| Databáze: | ScienceDirect |
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