Bis(trimethylsilyl)Ethylamine: Synthesis, Properties and its use as CVD Precursor
| Autor: | Ermakova, Evgeniya, Lis, Alexey, Kosinova, Marina, Rumyantsev, Yuri, Maximovskii, Eugene, Rakhlin, Vladimir |
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| Zdroj: | In Physics Procedia 2013 46:209-218 |
| Databáze: | ScienceDirect |
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