Effects of axisymmetric magnetic field on the distribution of Macroparticles on TiN and (Ti, Al) N films by arc ion plating
Autor: | Xiao, J.Q., Lang, W.C., Gong, J., Sun, C., Huang, R.F., Wen, L.S. |
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Zdroj: | In Physics Procedia 2011 18:193-201 |
Databáze: | ScienceDirect |
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