Effects of axisymmetric magnetic field on the distribution of Macroparticles on TiN and (Ti, Al) N films by arc ion plating

Autor: Xiao, J.Q., Lang, W.C., Gong, J., Sun, C., Huang, R.F., Wen, L.S.
Zdroj: In Physics Procedia 2011 18:193-201
Databáze: ScienceDirect