Experimental investigation of the mechanical micro structural and thermal properties of thin CrAIN layers deposited by PVD technique for various aluminum percentages

Autor: Ghrib, T., Tlili, B., Nouveau, C., Benlatreche, Y., Lambertin, M., Yacoubi, N., Ennasri, M.
Zdroj: In Physics Procedia November 2009 2(3):1327-1336
Databáze: ScienceDirect