Resolving deep sub-wavelength scattering of nanoscale sidewalls using parametric microscopy
| Autor: | Yadav, Nagendra Parasad, Xiong, Ji-Chuan, Liu, Wei-Ping, Wang, Wei-Ze, Cao, Yun, Kumar, Ashish, Liu, Xue-Feng |
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| Zdroj: | In Journal of Electronic Science and Technology September 2021 19(3) |
| Databáze: | ScienceDirect |
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