Spatially-resolved spectroscopic investigation of the inhomogeneous magnetic field effects on a low-pressure capacitively-coupled nitrogen plasma
| Autor: | Han, Jonggu, Kim, Jihoon, Park, Woojin, Park, Sang Jun, Baek, Song Yi, Yoo, Byeongsun, Choi, Chulhwan, Moon, Se Youn |
|---|---|
| Zdroj: | In Current Applied Physics December 2024 68:180-188 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect