Absolute density measurement of hydrogen atom in inductively coupled Ar/H2 plasmas using vacuum ultraviolet absorption spectroscopy
| Autor: | Cho, Deog Gyun, Han, Jonggu, Han, Duksun, Moon, Se Youn |
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| Zdroj: | In Current Applied Physics April 2020 20(4):550-556 |
| Databáze: | ScienceDirect |
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