Study on efficiency improvement of multi-crystalline silicon solar cell by removing by-product and plasma induced damage generated during reactive ion etching
| Autor: | Kim, Mu-joong, Min, Kwan Hong, Park, Sungeun, Song, Hee-eun, Lee, Jeong In, Jeong, Kyung Taek, Park, Jin-seong, Kang, Min Gu |
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| Zdroj: | In Current Applied Physics April 2020 20(4):519-524 |
| Databáze: | ScienceDirect |
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