Stable temperature coefficient of resistance in TiSiON thin film resistors deposited by magnetron co-sputtering
| Autor: | Mireles, Marcela, Quevedo Lopez, M.A. |
|---|---|
| Zdroj: | In Current Applied Physics November 2016 16(11):1484-1490 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect