Characterization of Si etching with N-fluoropyridinium salt
| Autor: | Tsukamoto, Kentaro, Uchikoshi, Junichi, Otani, Masaki, Hirano, Toshinori, Ie, Yutaka, Nagai, Takabumi, Adachi, Kenji, Kawai, Kentaro, Arima, Kenta, Morita, Mizuho |
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| Zdroj: | In Current Applied Physics December 2012 12 Supplement 3:S29-S32 |
| Databáze: | ScienceDirect |
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