Ultraprecision CMP for sapphire, GaN, and SiC for advanced optoelectronics materials
| Autor: | Aida, Hideo, Doi, Toshiro, Takeda, Hidetoshi, Katakura, Haruji, Kim, Seong-Woo, Koyama, Koji, Yamazaki, Tsutomu, Uneda, Michio |
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| Zdroj: | In Current Applied Physics September 2012 12 Supplement 2:S41-S46 |
| Databáze: | ScienceDirect |
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