Inductively coupled plasma post-treatment of Al-doped ZnO thin films
| Autor: | Seomoon, Kyu, Kim, Joonyeong, Ju, Suyong, Jang, Pyungwoo, Kim, Kwang-Ho |
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| Zdroj: | In Current Applied Physics 2011 11(4) Supplement:S30-S32 |
| Databáze: | ScienceDirect |
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