Electron interactions with plasma processing gases – Progress of magnetized electron-impact total cross section measurement system(ELECS-1)
| Autor: | Kim, Dae Chul, Song, Mi-Young, Kim, Yonghyun, Kim, Young-Woo, Choi, Young Rock, Yoon, Jung-Sik, Cho, Hyck |
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| Zdroj: | In Current Applied Physics 2011 11(5) Supplement:S192-S194 |
| Databáze: | ScienceDirect |
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