Properties of a-C:H films deposited from a methane electron cyclotron wave resonant plasma
| Autor: | Morrison, N.A., William, C., Racine, B., Milne, W.I., Martinez, E., Esteve, J., Andujar, J.L. |
|---|---|
| Zdroj: | In Current Applied Physics 2003 3(5):433-437 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect