A wireless-feeding capacitive electrode mechanism for achieving massive nanosecond parallel-discharge EDM for large-size wafer flattening
| Autor: | Guan, Junming, Wang, Hongqiang, Kunieda, Masanori, Zhao, Yonghua |
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| Zdroj: | In Journal of Manufacturing Processes 30 September 2024 126:230-244 |
| Databáze: | ScienceDirect |
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