Atomic surface induced by novel green chemical mechanical polishing for aspheric thin-walled crucibles with large diameters
| Autor: | Cui, Xiangxiang, Zhang, Zhenyu, Shi, Chunjing, Peng, Qibo, Liu, Xiaoyu, Liu, Xiuqing, Zhou, Hongxiu, Feng, Junyuan, Wen, Wei |
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| Zdroj: | In Journal of Manufacturing Processes 15 May 2024 117:59-70 |
| Databáze: | ScienceDirect |
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