Study on the mechanism of chemical mechanical polishing on high-quality surface of single crystal diamond
| Autor: | Liao, Longxing, Luo, Shanming, Chang, Xuefeng, Li, Shengbo, Shutin, Denis |
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| Zdroj: | In Journal of Manufacturing Processes 3 November 2023 105:386-398 |
| Databáze: | ScienceDirect |
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