Improving machinability of single-crystal silicon by cold plasma jet
| Autor: | Liu, Xin, Wang, Bingqi, Li, Yuheng, Zhou, Yuyang, Zhang, Jiahao, Wang, Ziheng, Yan, Jingcan, Gu, Xiaolei, Yuan, Zizhen, Chen, Yang, Wang, Shuaishuai, Liu, Jiyu |
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| Zdroj: | In Journal of Manufacturing Processes 4 August 2023 99:581-591 |
| Databáze: | ScienceDirect |
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