Multilevel process on large area wafers for nanoscale devices
| Autor: | Pires, B.J., Silva, A.V., Moskaltsova, A., Deepak, F.L., Brogueira, P., Leitao, D.C., Cardoso, S. |
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| Zdroj: | In Journal of Manufacturing Processes April 2018 32:222-229 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect