A robust control method for electrostatic microbeam dynamic shaping with capacitive detection
| Autor: | Kharrat, Chady, Colinet, Eric, Voda, Alina |
|---|---|
| Zdroj: | In IFAC Proceedings Volumes 2008 41(2):568-573 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Kharrat, Chady, Colinet, Eric, Voda, Alina |
|---|---|
| Zdroj: | In IFAC Proceedings Volumes 2008 41(2):568-573 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|