Directional Repetitive Control of a Metrological AFM
Autor: | Merry, Roel, Ronde, Michael, van de Molengraft, René, Koops, Richard, Steinbuch, Maarten |
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Zdroj: | In IFAC Proceedings Volumes 2010 43(18):206-211 |
Databáze: | ScienceDirect |
Externí odkaz: |
Autor: | Merry, Roel, Ronde, Michael, van de Molengraft, René, Koops, Richard, Steinbuch, Maarten |
---|---|
Zdroj: | In IFAC Proceedings Volumes 2010 43(18):206-211 |
Databáze: | ScienceDirect |
Externí odkaz: |