Probing Ni+ metastable state production in sputtering glow discharges with the use of diagnostic reactions
Autor: | Taylor, William S., Fancher, Kendall G., Chen, Li Chen, Ward, Benjamin K., Cameron, Casey A. |
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Zdroj: | In International Journal of Mass Spectrometry 15 October 2013 352:29-36 |
Databáze: | ScienceDirect |
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